Abstract: A novel microdetector array (MDA) for monitoring electron beam (eBeam) and extreme ultraviolet (EUV) lithography processes in 5 nm and beyond FinFET technology is first-time presented. This ...

Abstract: Organic electronics, taking advantage of flexibility and environmental sensitivity, have been investigated for diverse applications including flexible displays, wearable electronic devices ...

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A thriving manufacturing sector is vital to the nation’s economic health and global security, yet few companies possess the research and development (R&D) capacity essential to staying competitive.